Coating Process Bias Effect

Coating process bias effect:

1, improve the energy of charged particles in the vacuum plasma body, bombardment and cleaning the workpiece surface (reverse sputtering/etching), so that the workpiece surface can get a new surface after the impact of high-energy particles, so as to improve the adhesion of the subsequent deposition film layer.
2, improve and control the energy of charged particles in the vacuum plasma, increase the probability of collision ionization, attract charged particles to accelerate, improve the bonding force between the film layer and the workpiece matrix.
3. Adjust the color of the film by changing the deposition rules by different voltage output polarity or ways.
4, change the crystal structure of the film, improve the quality of the film.

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